The method of removing the byproduct polishing apparatus and polishing

An apparatus and a polishing method for removing a byproduct polishing, the polishing method for removing byproducts comprising: a positive electrode disposed at the center position of the polishing table, a negative electrode disposed at an edge position of the polishing table; after polishing a metal material, in applying a voltage between the positive electrode and the negative electrode; rotating the polishing table, with deionized water or chemical cleaning agents rinse polishing pad, the polishing by-product is removed after the metal material is polished. The polishing method for removing byproducts removal efficiency can be improved after the polishing by-products generated by the metal material of the polishing.