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Effects of Hydroxyethyl Cellulose and Colloidal Silica Abrasive on the Hydrophilicity of Polished Si Wafer Surfaces
Effects of Hydroxyethyl Cellulose and Colloidal Silica Abrasive on the Hydrophilicity of Polished Si Wafer Surfaces
2017
Kohsuke Tsuchiya
Yoshio Mori
Masami Kawaguchi
Keywords:
Abrasive
Hydroxyethyl cellulose
Colloidal silica
Wafer
Chemistry
Inorganic chemistry
Correction
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