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Optimisation of Selective Polysilicon Oxidation for 0.8μm-Technology
Optimisation of Selective Polysilicon Oxidation for 0.8μm-Technology
1988
Burmester
Kerber
Zeller
Keywords:
Stress (mechanics)
Materials science
Parasitic capacitance
Voltage
Microelectronics
Optoelectronics
Correction
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