Soft-X-ray scattering and diffraction by a lamellar multilayer amplitude grating: experiment and theory

Abstract Recently a dynamical differential theory of the diffraction by lamellar multilayer amplitude gratings has predicted the occurrence of various structures in the variations of the diffraction efficiency versus the glancing angle or the photon energy. The purpose of the present paper is to give an experimental evidence and a physical interpretation of these structures. Absolute measurements of efficiency are obtained at 277 eV with a 1000 lines/mm lamellar grating etched in a Mo/C multilayer structure. The differential dynamical theory and a new theoretical approach called the partial summation method are used for the interpretation.