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Effect of Forming Gas Furnace Annealing on the Ferroelectricity and Wake-Up Effect of Hf0.5Zr0.5O2 Thin Films
Effect of Forming Gas Furnace Annealing on the Ferroelectricity and Wake-Up Effect of Hf0.5Zr0.5O2 Thin Films
2020
Aniruddh Shekhawat
Glen Walters
Ching-Chang Chung
R. Garcia
Yang Liu
Jacob L. Jones
Toshikazu Nishida
Saeed Moghaddam
Keywords:
Analytical chemistry
Forming gas
Chemical engineering
Chemistry
Annealing (metallurgy)
Thin film
Wake
Ferroelectricity
Correction
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