Strain and mosaic deformation in laser irradiated silicon

The effect of moderately intense (∼GWcm−2 The effect of moderately intense (~GWcm-2), 200 ps laser pulse irradiation on silicon single crystal is reported. The x-ray diffraction measurements performed on the irradiated samples reveal irreversible structural deformations. Raman spectroscopic measurements reveal substantial shift of the peak position as well as an overall broadening, pointing towards the presence of residual strain and formation of micromosaic structures on the laser induced shock recovered samples.