Characteristics of sheet plasma ion source

A sheet plasma ion source has been developed. The new technology will allow simultaneous irradiation of large area samples of 500 mm in width with a high‐current ion beam. As a first step of this development, a sheet ion beam of 90 mm width and currents of 38 mA had been successfully extracted from the stable sheet plasma. Both characteristics of the sheet plasma discharge and the sheet ion beam extraction are reported in this article.