Old Web
English
Sign In
Acemap
>
Paper
>
Half-Micron LOCOS Isolation Using High Energy Ion Implantation
Half-Micron LOCOS Isolation Using High Energy Ion Implantation
1992
Koji Suzuki
Kazunobu Mameno
Hideharu Nagasawa
Atsuhiro Nishida
Hideaki Fujiwara
Kiyoshi Yoneda
Keywords:
Micrometre
Electronic engineering
Ion implantation
Engineering
LOCOS
Optics
high energy
Optoelectronics
locos isolation
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]