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Laser ion implantation of Ge in SiO2 using a post-ion acceleration system
Laser ion implantation of Ge in SiO2 using a post-ion acceleration system
2017
M. Cutroneo
Anna Macková
L. Torrisi
V. Lavrentiev
Keywords:
Acceleration
Ion implantation
Atomic physics
Physics
Laser
Ion
ion acceleration
Correction
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