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Highly Reliable Trench Capacitor With SiO2/Si3N4/SiO2 Stacked Film
Highly Reliable Trench Capacitor With SiO2/Si3N4/SiO2 Stacked Film
1987
Toshiaki Watanabe
N. Goto
N. Yasuhisa
Toshiyuki Yanase
T. Tanaka
Shigeru Shinozaki
Keywords:
Capacitor
Electronic engineering
Leakage (electronics)
Surgery
Electric field
Breakdown voltage
Electrical breakdown
Trench
Medicine
Correction
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