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Gas Phase Diagnosis of Disilane/H 2 RF Glow-Discharge Plasma And Its Application to High Rate Growth of High Quality a-Si:H
Gas Phase Diagnosis of Disilane/H 2 RF Glow-Discharge Plasma And Its Application to High Rate Growth of High Quality a-Si:H
1998
W. Futako
Tomoko Takagi
T. Nishimoto
Michio Kondo
Akihisa Matsuda
Keywords:
Analytical chemistry
Disilane
glow discharge plasma
high rate
Materials science
gas phase
Correction
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