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Formation and thermal stability of NiSi phase in Ni(30 nm)/Pt(2 nm; 6 nm)/Siep (50 nm)/Si(001) thin film systems
Formation and thermal stability of NiSi phase in Ni(30 nm)/Pt(2 nm; 6 nm)/Siep (50 nm)/Si(001) thin film systems
2013
Iu N. Makogon
E. P. Pavlova
S. I. Sidorenko
G. Beddies
D. L. Beke
A. Csik
T. I. Verbitska
E. V. Figurhaya
R. A. Shkarban
Keywords:
Thin film
Thermal stability
Chemistry
Inorganic chemistry
Chemical engineering
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