A process for coating micromechanical components having a dual diamond coating
2011
A method of coating micro-mechanical components of a micro-mechanical system, in particular a timepiece, comprising: • providing a substrate component to be coated (4); • providing the component with a first diamond coating (2) which is doped so as to increase the conductivity of the diamond layer; • providing the component with a second diamond coating (3); in which: • is the second diamond coating applied by deposition in a reaction chamber; during CVD deposition, during the last part of the growth process, a controlled increase of the carbon content in the reaction chamber is provided, thereby increasing the sp2 / sp3 carbon (6) bonds up to a sp2 content substantially between 1% and 45% provided. Corresponding micromechanical components are also provided.
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