A Silicon Rate Sensor With Closed-Loop Drive and Sense Circuits

Frank Wang,Marc Smith,Larry Hobbs,Hai Yan

A Silicon Rate Sensor With Closed-Loop Drive and Sense Circuits

2003

Frank Wang
Marc Smith
Larry Hobbs
Hai Yan

A micromachined vibrating gyroscope rate sensor with closed-loop drive and sense circuits is presented. In addition, the quadrature cancellation implementation is discussed. In order to improve the sensitivity of the rate sensor, frequency tuning of the drive and sense circuits is employed.© 2003 ASME

Keywords:

Electronic circuit
Control engineering
Gyroscope
Electronic engineering
Engineering
Silicon
closed loop
Quadrature (mathematics)
Surface micromachining

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