Calibration of CBCM Measurement Hardware

Charge-based capacitance (CBCM) measurements require precise measurement of AC currents. This work describes a test structure that produced periodic pulses of current to mimic a CBCM circuit. It was measured in both wafer form on a parametric test system and in package form on a functional test system. Average currents from 600 pA to $10 \mu \mathrm{A}$ at frequencies between 290 kHz and 2.6 GHz were measured on both systems. The parametric tester was shown to be capable of measuring AC currents across that entire range of currents and frequencies. The functional tester was capable at high frequencies, but showed measurement errors at lower currents, seemingly in agreement with its DC current measurement specifications. This technique could be used to validate the limits of any test hardware prior to designing an AC circuit.