Research on Key Indicators of Electrostatic Discharge Metrology

The randomness of electrostatic discharge current waveform is considered to present great problems in experimental data analysis and drawing conclusions. In order to solve this problem, we measured a large amount of data in electrostatic discharge experiments. The experimental data are studied by statistical methods and new parameters of waveform dispersion, the waveform error within group (Ew) and the waveform error between groups (Eb), are defined in this paper. And peak current, rise time, 30ns current, 60ns current are also analyzed. The results indicate that statistical analysis plays an important role in the experimental study of electrostatic discharge and the parameter variations of contact discharge equivalent circuit might be an important factor of the randomness of electrostatic discharge current waveform.