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Defect Generation in Device Processing and Impact on the Electrical Performances
Defect Generation in Device Processing and Impact on the Electrical Performances
2013
Maria Luisa Polignano
I. Mica
Gianpietro Carnevale
Aurelio Mauri
E. Bonera
Serenella Speranza
Keywords:
Raman spectroscopy
CMOS
Optoelectronics
Materials science
Electronic engineering
Correction
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