DLC layer system and method and apparatus for producing such a layer system

A method for producing a layer system for wear protection, corrosion protection and for improving the sliding properties with an adhesive layer on a substrate, a transition layer on the adhesive layer and a cover layer of diamond-like carbon, the adhesive layer of at least one element of the 4th, 5th, and / or 6th transition group, and / or silicon, the transition layer of carbon and at least one element of the 4th, 5th and / or 6th transition group, and / or silicon, and the top layer consists essentially of diamond-like carbon and any metallic elements or silicon, wherein the layer system has a hardness of at least 15 GPa, and an adhesive strength of at least 3 HF and the top layer has a fine grain structure, that is, having no glassy amorphous structure, is the grain size of ≤ 300 nm, preferably ≤ 100 nm, wherein the transition layer and / or cover layer additionally hydrogen and unavoidable bare contain impurities, the unavoidable impurities noble gases, especially argon and xenon are, wherein the coating layer has a hydrogen content of 5 to 30 atomic%, ...