Ion implantation in glasses and concomitant effects

Abstract Various ions with energies of 30-400 keV, doses of 6.2-10,5-6.2'1016 ion/cm2, and current densities of 1-10 μA/cm2 were implanted in silicate glasses. Ion bombardment markedly altered the near-surface glass layer. The contributions of complicated physical-chemical processes to the resultant modification of the structure and properties of the glasses, in particular the contribution of chemical effects were determined. Antireflection in the IR range and long-range interaction were observed in ion-implanted glasses.