Robust fabrication and evaluation of nanopattern insert molded parts

Abstract Nanopatterning techniques have been developed for optical, magnetic, chemical, biological, and micro/nanoelectronic applications, where the verification of the nanopattern geometry is also critical for quality control of nanoengineered products. Nanopattern insert molding is a new method to produce nanopatterns on polymeric surface with high resolution, good productivity, and low cost. In this study, a disposable polymeric film, made of polyvinyl alcohol (PVA), was used as a stamp for replicating nanopatterns. In addition, a specialized image processing platform was proposed to characterize nanopattern structures, especially circular nanopillars with high accuracy and convenience. Such a tool was used for optimization of nanopattern processing conditions. The “shape dispersity index” was introduced to evaluate the replication quality in more systematic and robust manners.