Electron beam effects in AES studies of micron size insulating particles

Abstract The problems associated with the Auger electron analysis of individual nonconducting 10–30 μ m sized particles isolated on an indium substrate are discussed. When low electron current densities are used, many of the particles studied charge in an uneven manner across their surface, preventing analysis. The observation that this charging effect can be largely removed or quantified by using higher electron beam current densities is described, and a based on the thermal effects of the electron beam on the particle is proposed. Care must be taken to prevent the electron beam from inducing secondary effects. However, it is often possible to be these higher electron density beams to differentiat between Auger peaks from the particles and those from the indium substrate.particles, incomplete and/or incorrect assignment of the surface species and their concentration could be made.