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Guidelines for the Threshold Voltage Control of Metal/HfSiON system
Guidelines for the Threshold Voltage Control of Metal/HfSiON system
2008
Nishiyama Akira
Tsuchiya Yoshinori
Yoshiki Masahiko
Kinoshita Atsuhiro
Koga Junji
Koyama Masato
Keywords:
Threshold voltage
Metal
Optoelectronics
Materials science
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