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Fabrication of Sn-Cu alloy superconducting films for filled superconducting through-silicon vias
Fabrication of Sn-Cu alloy superconducting films for filled superconducting through-silicon vias
2019
Go Fujii
Masahiro Ukibe
Kazumasa Makise
Mutsuo Hidaka
Shuichi Nagasawa
Hirotake Yamamori
Kunihiro Inomata
Takahiro Yamada
Shiro Kawabata
Keywords:
Alloy
Fabrication
Superconductivity
Optoelectronics
Silicon
Materials science
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