Old Web
English
Sign In
Acemap
>
Paper
>
A device for applying a layer on a planar substrate.
A device for applying a layer on a planar substrate.
2002
Uwe Hoffmann
Jutta Trube
Dieter Haas
Keywords:
Planar
Optoelectronics
Substrate (chemistry)
Materials science
planar substrate
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]