Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging

In this work, we investigate Au/Zr/V/Zr multilayer getters in order to get a sustainable low pressure in a packaging cavity. These films were analyzed by using four probe resistivity measurements, SEM and TEM cross section observations and Energy Dispersive X-Ray Spectrometry (EDX) measurements. It is demonstrated that the activation temperature of a zirconium layer covered with a vanadium layer depends on the vanadium layer thickness. Other experiments demonstrate that Au/Zr/V/Zr multilayer getter films can be activated at low temperature and that suitable sorption properties to get a low pressure in a medium size vacuum package during 9 months can be achieved after activation at 300°C for 1 hour.