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Application of ion beam analysis for the characterization of SiC- and DLC-thin films
Application of ion beam analysis for the characterization of SiC- and DLC-thin films
2020
Fotini Noli
Panagiotis Misaelides
M. Kokkoris
J.P. Rivière
Keywords:
Thin film
Optoelectronics
Materials science
Ion beam analysis
Correction
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