Piezoelectric characteristic analysis of diaphragm type PZT oscillator

We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth using an FEM simulator. The remarkable finding is that the receiving frequency bandwidth of the proposed model is much wider than a typical one. In addition, we confirmed a superiority and a future task in consideration of producing a piezoelectric micromachined ultrasonic transducer (pMUT) array.