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シリコンとカプトン基板上に蒸着したTi下部電極上の(002)配向AlN薄膜の成長評価【Powered by NICT】
シリコンとカプトン基板上に蒸着したTi下部電極上の(002)配向AlN薄膜の成長評価【Powered by NICT】
2017
M.A. Signore
A. Taurino
M. Catalano
Moon J. Kim
Zifan Che
F. Quaranta
Pietro Siciliano
Keywords:
Metallurgy
Materials science
Mechanical engineering
Correction
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