Three-dimensional microsupercapacitors based on interdigitated patterns of interconnected nanowire networks

Abstract There is a proliferation of autonomous microscale devices, which are increasingly in need of power sources of commensurate form factors. The trade-off between the areal energy and power capabilities of miniature energy storage devices restrict their abilities to meet the requirements of these microscale devices. However, three-dimensional (3D) micro- and nanoarchitectures have the potential to meet the energy requirements of autonomous microscale devices, while retaining the power capabilities of thin-film systems. In this paper, we present a novel full-cell architecture and fabrication strategy for 3D microscale energy storage devices based on template-assisted electrodeposition of three-dimensionally interconnected metallic nanowire network, and its subsequent laser-patterning to form interdigitated nanostructured electrodes. The patterned nanowire networks are functionalized with the polyaniline active electrode material via an electroless deposition procedure. We show that a footprint areal capacitance/energy enhancement of more than 5 times is achieved by just 10 μm-high nanowire networks, in addition to enhanced power capabilities.