Old Web
English
Sign In
Acemap
>
Paper
>
Effect of Atomic Layer Etching Adsorption Layer on Substrate Damage Generation
Effect of Atomic Layer Etching Adsorption Layer on Substrate Damage Generation
2021
Akiko Hirata
Masanaga Fukasawa
J. U. Tercero
Tomoko Ito
Michiro Isobe
Kazuhiro Karahashi
Satoshi Hamaguchi
K. Kugimiya
Yoshiya Hagimoto
Hayato Iwamoto
Keywords:
substrate
Materials science
Adsorption
layer
Etching (microfabrication)
Plasma
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]