Silicon heterojunction solar cell and interface treatment method therefor

The invention discloses a silicon heterojunction solar cell and an interface treatment method therefor. The interface treatment method for the heterojunction solar cell is improved. Before a hydrogenated amorphous silicon n film or a hydrogenated amorphous silicon p film is deposited, hydrogen plasma interface treatment is carried out on a hydrogenated amorphous silicon i film conveyed to a deposition chamber; and stains generated by the hydrogenated amorphous silicon i film again in the depositing and conveying processes are eliminated, so that the interface between the hydrogenated amorphous silicon i film and the hydrogenated amorphous silicon p film and the interface performance between the hydrogenated amorphous silicon i film and the hydrogenated amorphous silicon n film are ensured; and the performance of the cell is improved.