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Influence of Elements Addition on Crystal Structure of AlN Piezoelectric Thin Film
Influence of Elements Addition on Crystal Structure of AlN Piezoelectric Thin Film
2018
Saki Tanaka
Masato Uehara
Sri Ayu Anggraini
Tetsuya Okuyama
H. Yamada
Morito Akiyama
Keywords:
Thin film
Crystal structure
Aluminium nitride
Piezoelectricity
Materials science
Composite material
piezoelectric thin films
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