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HANDBOOK OF CHEMICAL VAPOR DEPOSITION (CVD)
HANDBOOK OF CHEMICAL VAPOR DEPOSITION (CVD)
1999
Hugh O. Pierson
Hugh Pierson
Gary E. McGuire
Stephen M. Rossnagel
Keywords:
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Plasma processing
Deposition (phase transition)
Plasma-enhanced chemical vapor deposition
Inorganic chemistry
Materials science
Combustion chemical vapor deposition
Chemical engineering
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