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Material Aspects and Challenges for SOI FinFET Integration (Invited)
Material Aspects and Challenges for SOI FinFET Integration (Invited)
2008
Mark Van Dal
Georgios Vellianitis
Ray Duffy
Bartek Pawlak
Kevin Lai
Andriy Hikavyy
Nadine Collaert
Malgorzata Jurczak
Rob Lander
Keywords:
Electronic engineering
Silicon on insulator
Materials science
Engineering physics
soi finfet
Computer science
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