Effect of Annealing Temperature on the Structural and Electrical Properties of a-Axis-Oriented SrTiO3 Films

Strontium titanate films with high a-axis-orientation [a(100) = 94.1%] were deposited on (111) Pt/Ti/SiO2/Si substrates by the metal organic deposition process. X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature. It is found that the dielectric properties are improved by a higher annealing temperature, while the leakage currents are also enhanced, and the possible causes of temperature dependence are discussed.