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Patterning challenges in advanced device architectures: FinFETs to nanowires
Patterning challenges in advanced device architectures: FinFETs to nanowires
2016
Naoto Horiguchi
Alexey Milenin
Zheng Tao
H. Hubert
Efrain Altamirano Sanchez
Anabela Veloso
Liesbeth Witters
Niamh Waldron
Ragnarsson L.‐A.
Min-Soo Kim
Yoshiaki Kikuchi
Hans Mertens
Praveen Raghavan
Daniele Piumi
Nadine Collaert
Kathy Barla
Keywords:
Nanotechnology
Nanowire
Materials science
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