Platforms for GHz Microplasma-Material Studies

Split-ring resonators and a dielectric-loaded, double-ridge waveguide are developed as platforms for studying plasmamaterial interactions when igniting and sustaining plasmas using microwaves. Split-ring resonators have been studied extensively in the past as devices for microplasma formation using microwaves 1 . Here, we utilize simulations to inform the design of rings. In order to expedite materials studies, we study screen-printing as a method for producing split-ring resonators which resonate at 2.7GHz. The effects of different materials on plasma generation and plasma damage are explored in Ar and air plasmas.