MEMS device with schalldruckempfindlichem membrane element and piezo-sensitive signal detection

Is that spans an opening (54) or cavity in the layer structure and its displacements (with the aid of at least one piezo-sensitive circuit element (58) in the connection region of the membrane element for a MEMS device (51), in whose layer structure is formed at least one sound-pressure-sensitive diaphragm member (531) 531 are recorded), design measures are proposed by which the stress distribution over the membrane surface during deflection of the membrane element is to be selectively influenced. In particular, measures are proposed by which the mechanical stresses are selectively introduced into predetermined regions of the membrane element, so as to enhance the measurement signal. For this purpose, the membrane element (531) is intended in the present invention comprise at least one intended bending region (55) which is defined by the structure (571) of the diaphragm member (531) and deformed more at sonic exposure, than the adjacent diaphragm portions (56).