Low frequency MEMS accelerometers in health monitoring – A review based on material and design aspects

Abstract Vibration study is a key aspect in the field of mechanics, aviation or human health for detecting, monitoring and controlling. The role of movement, tremor vitally decides the healthiness of a device. MEMS accelerometers are popular in vibration monitoring systems as they are accurate, sensitive, capable of integrating with electronics systems. This paper covers a wide picture of accelerometer design based on material and structural optimization of various models from literature and also discussed design challenges of Accelerometers for Human health monitoring through the detection of tremor, movement disorders, impairment in motor skills which are common symptoms for neurological disorders.