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Production of rare earths ion beams in arc discharge ion source using their oxides
Production of rare earths ion beams in arc discharge ion source using their oxides
2016
M. Turek
A. Droździel
K. Pyszniak
S. Prucnal
Keywords:
Ion implantation
Atomic physics
Electric arc
Electronic engineering
Ion
Engineering
Beam (structure)
Ion source
Correction
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