Numerical Method of Cavity Adjustment by the Output Beam Image

Results of numerical and experimental studies of the control of optical elements of a KrF laser cavity by use of the image processing method are presented. Different methods of beam image binarization for determining the boundary dimensions and flattening the distribution of its radiation intensity are considered. Conditions allowing one to accelerate the process of dispersive cavity adjustment in the automatic regime of laser operation and to restore the initial parameters of the output beam with an accuracy of up to 5% are determined.