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Memory characteristics of Cobalt-Silicide nanocrystals embedded in HfO₂ gate oxide for nonvolatile flash devices
Memory characteristics of Cobalt-Silicide nanocrystals embedded in HfO₂ gate oxide for nonvolatile flash devices
2008
JunSeok Lee
Joohyung Kim
JungYup Yang
JinPyo Hong
Keywords:
Nanocrystal
Gate oxide
Cobalt
Silicide
Materials science
Electronic engineering
Nanotechnology
cobalt silicide
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