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A Silicon MEMS EM vibration energy harvester
A Silicon MEMS EM vibration energy harvester
2019
Yuechen Yang
Ujwal Radhakrishna
D Ward
Anantha P. Chandrakasan
Jeffrey H. Lang
Keywords:
Microelectromechanical systems
Silicon
Materials science
energy harvester
Vibration
Optoelectronics
Correction
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