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Short-pulse laser-assisted fabrication of a hybrid Si-SiO2 microcooling device
Short-pulse laser-assisted fabrication of a hybrid Si-SiO2 microcooling device
2021
Alexandros Mouskeftaras
Stephan Beurthey
Julien Cogan
Gregory David Hallewell
A. Mapelli
David Grojo
M. Perrin-Terrin
Keywords:
Optoelectronics
Materials science
Fabrication
short pulse laser
Correction
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