Ion beam synthesis of cubic boron nitride

Thin films containing cubic phase boron nitride have been synthesized using an ion beam extracted from a borazine (B3H3H6) plasma.We report on x‐ray diffractometry, hardness tests, and Auger analysis of the deposited films. The x‐ray diffractometer peak corresponding to cubic phase boron nitride was detected while peaks corresponding to hexagonal phase were usually absent. Consistent with the presence of cubic phase indicated by the x‐ray analysis, the indentation hardness of boron nitride‐coated substrates was higher than the same uncoated substrates. Auger compositional profiles indicated a film stoichiometry corresponding to boron nitride and suggested that the deposition method produced an intermixing layer between the boron nitride film and the substrate.