Structure and Optical Properties of Mg_(0.33)Zn_(0.67)O Film Deposited on Si(100) Substrate

Mg_(0.33)Zn_(0.67)Ofilm was prepared on silicon(100) substrate by RF magnetron sputtering(RFMS) method.Structure and optical properties of Mg_(0.33)Zn_(0.67)Ofilm were studied.Result indicates that Mg_(0.33) Zn_(0.67) O film deposited on Si substrate is hexagonal wurtzite structure.The growth orientation of the film is along c axis and the lattice of c axis orientation increases 0.03 nm.The film is present superior semiconductor property.The absorption peak of exciton is at 297 nm and the band gap of film is about 4.3 eV.The average grain diameter is about 20 nm.The fluorescent emission peak is at 368 nm under deep-ultraviolet excitation.