An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar

This paper reports an integrated forward-view 2-axis MEMS scanner that enables ultrasmall 3D LiDAR for applications in micro-air vehicles (MAV). A new design of a pair of vertically-oriented 2-axis scanning MEMS scanner is proposed and fabricated using an innovative fabrication process. Such MEMS scanners are integrated on a silicon optical bench and bent vertically to the substrate, thus forward scan is realized without any beam-folding mirrors. The mirror plate is $\mathbf{0.7\ mm}\times \mathbf{0.7}$ mm. The measured optical scan range reaches 17° in both axes at only 4.5 V. The measured resonance frequency of the angular scanning mode is 2.2 kHz. Good optical alignment for LiDAR scanners can be achieved without extra alignment efforts. This MEMS mirror allows a forward-view LiDAR scanner to be monolithically integrated and aligned on a single chip.