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Self-test for rate sensors

2009 
A yaw rate sensor (10) comprises a movable mass structure (12) and a drive component (13) which is adapted to displace the movable mass structure (12) in motion (14), and an evaluation component (15) which is adapted to detect a response (40) of the movable mass structure (12) to a rotation rate (Ω). A method for testing the function of a yaw rate sensor (10) comprising the steps of: driving a movable mass structure (12), feeding a test signal (42) in a quadrature control loop (44) at a feed location (48) of the quadrature control loop (44), returning a articulating (40 ) of the movable mass structure (12), detecting an amount of returning the movable mass structure (12), reading out a response signal (47) from the quadrature control loop (44). In the angular rate sensor (10) as well as in the process is the reading of the response signal (47) with respect to a processing direction (45) of the test signal (42) between a feed location (48) for a test signal (42) and an actuator (38) for returning a deflection (40) of the movable mass structure (12).
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