Noninvasive characterization of continuous-profile blazed diffraction gratings
2001
Smooth, continuous-profile diffractive optical elements and other
regular microstructures demand advanced characterization
methods. Here the problem of reconstructing the profiles with
optical scatterometry is addressed for the first time to our
knowledge. We represent the profile of a blazed grating with an
analytic Chebyshev series. The coefficients of the series are
inferred from the far-field diffraction pattern, when the grating
profile is illuminated with coherent light. An advanced
neural-network model is used as a nonlinear statistical
estimator. The reconstruction error is found to be less than 4% as
normalized to the depth of the profile, even with realistic measurement
errors included in the simulations.
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