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a-SiN:H films modified by ArF excimer laser irradiation
a-SiN:H films modified by ArF excimer laser irradiation
1998
N. Banerji
Julia Serra
Stefano Chiussi
Fernando Lusquiños
B. León
Mariano Pérez Amor
Keywords:
excimer laser irradiation
Nitride
Electromagnetic radiation
Fabrication
Irradiation
Materials science
Optoelectronics
Correction
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